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US Patent 7166016 Six headed carousel

Patent 7166016 was granted and assigned to Applied Materials on January, 2007 by the United States Patent and Trademark Office.

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Patent Inventor Names
Hung Chih Chen0
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Patent abstract

The present invention relates to an apparatus and method for polishing semiconductor substrates with improved throughput and reduced foot print. One embodiment of the present invention provides an apparatus for polishing a substrate. The apparatus comprises a base, four polishing stations disposed on the base, two load cups disposed on the base and a carousel supported by the base. The carousel comprises six substrate heads and is rotatable about a carousel axis. Each of the six substrate heads is configured to align with any one of the four polishing stations and the two load cups.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=071660160
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Patent Citations Received
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US Patent 11705354 Substrate handling systems
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Patent Citations Received
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US Patent 11691241 Abrasive lapping head with floating and rigid workpiece carrier
0
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US Patent 07166016 Six headed carousel US Patent 7166016 Six headed carousel

Infobox
Patent Number
071660160
Patent Number
71660160
Edits on 25 Sep, 2022
"Entity importer update"
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edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
071660160
Date of Patent
January 23, 2007
0
Patent Application Number
114377650
Date Filed
May 18, 2006
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=071660160
Patent Primary Examiner
‌
Jacob K. Ackun Jr.
0
Edits on 8 Jun, 2022
"Entity importer update"
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edited on 8 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07166016
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 US Patent 07166016 Six headed carousel

Infobox
Is a
Patent
Patent
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07166016
Date of patent
January 23, 2007
Patent application number
11437765
Date Filed
May 18, 2006
Patent primary examiner
‌
Jacob K. Ackun Jr.

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