Patent 7168289 was granted and assigned to NGK Insulators on January, 2007 by the United States Patent and Trademark Office.
The present invention provides a method of measuring a physical quantity using a vibrator. The vibrator has a plurality of driving vibration arms, a plurality of detection vibration arms, films for adjusting a weight provided on the driving vibration arms, and detecting electrodes provided on the detection vibration arms. A driving vibration is excited in the vibrator, and output signals are output from the detecting means based on a detection vibration excited in the vibrator responsive to the physical quantity. The weight of each of the films is adjusted based on a comparison of the output signals from the detection vibration arms.