Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bi-Ming Yen0
Babak Kadkhodayan0
Dean J. Larson0
Di Wu0
Kenji Takeshita0
Peter Loewenhardt0
William M. Denty, Jr.0
Xingcai Su0
Date of Patent
January 30, 2007
Patent Application Number
10318612
Date Filed
December 13, 2002
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus for providing different gases to different zones of a processing chamber is provided. A gas supply for providing an etching gas flow is provided. A flow splitter in fluid connection with the gas supply for splitting the etching gas flow from the gas supply into a plurality of legs is provided. A tuning gas system in fluid connection to at least one of the legs of the plurality of legs is provided.
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