Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshio Masuda0
Kazue Takahashi0
Mitsuru Suehiro0
Tatehito Usui0
Hideyuki Yamamoto0
Hiromichi Enami0
Hiroshi Kanekiyo0
Date of Patent
January 30, 2007
Patent Application Number
10732285
Date Filed
December 11, 2003
Patent Primary Examiner
Patent abstract
A plasma processing apparatus having a sample stage disposed inside a vacuum chamber and a plate member disposed opposing to a sample which is placed on the sample stage and supplied with electric power. The sample is processed using a plasma generated between the sample stage and the plate member and a measuring port is disposed at a back side of the plate member. The measuring port includes an optical transmitter which receives light from a surface of the sample, and a seal which vacuum-seals between an atmospheric side and vacuum side of the vacuum chamber.
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