Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yi Yeol Lyu0
Jin Heong Yim0
Kwang Hee Lee0
Seok Chang0
Jae Geun Park0
Ji Man Kim0
Date of Patent
January 30, 2007
Patent Application Number
10724732
Date Filed
December 2, 2003
Patent Primary Examiner
Patent abstract
The present invention provides a composition for preparing porous dielectric thin films containing pore-generating material, said composition comprising gemini detergent, and/or a quaternary alkyl ammonium salt, a thermo-stable organic or inorganic matrix precursor, and solvent for dissolving the two solid components. There is also provided an interlayer insulating film having good mechanical properties such as hardness, modulus and hydroscopicity, which is required for semiconductor devices.
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