Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sergei L. Voronov0
Christopher L. Rumer0
Eric J. Li0
Date of Patent
January 30, 2007
0Patent Application Number
109809430
Date Filed
November 3, 2004
0Patent Primary Examiner
Patent abstract
A method is described for laser scribing or dicing portions of a workpiece using multi-source laser systems. In one embodiment, a first laser uses multiphoton absorption to lower the ablation threshold of portions of the workpiece prior to a second laser ablating the portions of the workpiece. In an alternative embodiment, a first laser uses high energy single-photon absorption to lower the ablation threshold of portions of the workpiece prior to a second laser ablating the portions of the workpiece.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
