US Patent 7170585 Projection lens and microlithographic projection exposure apparatus
Patent 7170585 was granted and assigned to Carl Zeiss SMT on January, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 7, 2005
Date of Patent
January 30, 2007
Patent Application Number
11101235
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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