US Patent 7170667 Lifetime improvement in microstructures with deformable elements

Patent 7170667 was granted and assigned to Texas Instruments on January, 2007 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Texas Instruments

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

71706670

Patent Inventor Names

Jonathan Doan0

Date of Patent

January 30, 2007

Patent Application Number

113030880

Date Filed

December 14, 2005

Patent Primary Examiner

‌

Timothy Thompson

Patent abstract

A microelectromechanical device with a plastically deformable element of is exposed to illumination light so as to elongate the lifetime of the device on the customer side.

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