Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuval Greenzweig0
Ilan Gavish0
Date of Patent
February 6, 2007
0Patent Application Number
102094530
Date Filed
July 30, 2002
0Patent Primary Examiner
Patent abstract
Introducing at least one metal such as cobalt, molybdenum, metal carbonyl, tungsten, platinum, or other suitable metal to a focused ion beam. Introducing the focused ion beam to a substrate within a processing chamber. Forming at least one layer over a substrate. Applying heat to the layer by, for example, a laser.
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