Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 6, 2007
0Patent Application Number
101954530
Date Filed
July 16, 2002
0Patent Primary Examiner
Patent abstract
The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.
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