Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tetsuya Kurosawa0
Masahisa Otsuka0
Date of Patent
February 6, 2007
0Patent Application Number
110384790
Date Filed
January 21, 2005
0Patent Primary Examiner
Patent abstract
A peeling device 11 includes an adsorber 15 having an adsorbing face 20A that adsorbs and retains a wafer W, and a peeling element 17 that holds a protective sheet H stuck to the wafer W, and peels off the protective sheet H from the wafer W through moving relatively to the adsorber 15. The adsorber 15 and the peeling element 17 are arranged so as to peel off the protective sheet H from the wafer W intermittently through moving relatively to each other while a peeling operation and a counter-peeling operation are performed alternately.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
