Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 6, 2007
Patent Application Number
10895477
Date Filed
July 21, 2004
Patent Primary Examiner
Patent abstract
A method of depositing polymer thin films on a MEMS device having a wafer stack includes depositing one or more protection films on a polymer thin film layer on the wafer stack, fabricating the MEMS device, and removing the one or more protection films.
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