US Patent 7174793 Sensor sheet

In a sensor sheet of the present invention, a large number of sensor cells, each having capacitance element electrodes corresponding to an X-axis direction, a Y-axis direction and a Z-axis direction and a displacement electrode arranged to form capacitance elements between the capacitance element electrodes and the displacement electrode, are arranged in matrix. This arrangement enables measurement of a distribution of three-dimensional components of the force applied from outside over the overall sensor sheet on the basis of the components of force detected in each of the large number of sensor cells.