Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroyuki Miyamoto0
Kenji Takeo0
Date of Patent
February 13, 2007
0Patent Application Number
108444000
Date Filed
May 13, 2004
0Patent Primary Examiner
Patent abstract
A plating underlayer is formed on an insulating film. An anti-reflection film is formed on the plating underlayer. A photoresist is formed over the antireflection film 62. The photoresist and the antireflection film are exposed and developed to form a resistframe made thereof. A second magnetic layer is formed within an inner pattern enclosed by the resistframe. The anti-reflection film is made of a material soluble for a developer through exposure.
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