US Patent 7176405 Heat shield for thermal processing
Patent 7176405 was granted and assigned to Ultratech on February, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 22, 2005
Date of Patent
February 13, 2007
Patent Application Number
11112647
Patent Inventor Names
Michael O. Thompson
0
Boris Grek
0
Iqbal A. Shareef
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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