Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 13, 2007
Patent Application Number
10528548
Date Filed
October 24, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
In an electron beam exposure method in which an article subjected to exposure and an electron beam irradiation spot are moved relative to each other at a continuous speed, the article is exposed at a plurality of irradiation intensities of an electron beam by changing a transmittance of an electron optical system for forming the electron beam irradiation spot on the article.
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