US Patent 7176770 Capacitive vertical silicon bulk acoustic resonator
Patent 7176770 was granted and assigned to Georgia Tech Research Corporation on February, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 22, 2005
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Date of Patent
February 13, 2007
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Patent Application Number
11208818
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Patent Inventor Names
Gavin Kar-Fai Ho
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Siavash Pourkamali
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Farrokh Ayazi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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