US Patent 7179581 Resist composition and patterning process
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Patent abstract
Resist compositions comprising nitrogen heterocyclic compounds having a pyrrole or nitrogen-bearing 5-membered ring structure and a polar functional group have an excellent resolution and an excellent focus margin and are useful in microfabrication using electron beams or deep-UV light.
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US Patent 07179581 Resist composition and patterning process US Patent 7179581 Resist composition and patterning process
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Patent Number
0717958100
Patent Number
717958100
Edits on 26 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071795810
Date of Patent
February 20, 2007
0Patent Application Number
108494760
Date Filed
May 20, 2004
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
071795810
Date of Patent
February 20, 2007
0Patent Application Number
108494760
Date Filed
May 20, 2004
0Official Website
Patent Primary Examiner
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US Patent 07179581 Resist composition and patterning process
Infobox
Is a
Patent jurisdiction
Patent number
07179581
Date of patent
February 20, 2007
Patent application number
10849476
Date Filed
May 20, 2004
Patent primary examiner
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