Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Norihiro Ito0
Yasuhiro Chouno0
Hiroaki Kawaguchi0
Date of Patent
February 20, 2007
0Patent Application Number
105191260
Date Filed
June 25, 2003
0Patent Primary Examiner
Patent abstract
A steam generator 40′ provided in a substrate processing apparatus includes a tank 301 having a hollow cylindrical member 302 formed of a composite of PTFE and PFA and a pair of side wall plates 303 connected to the opposite ends of the cylindrical member 302. The tank 301 is surrounded by a shell 305 of an aluminum alloy to prevent deformation of the tank due to internal pressure of the tank. A heater 308 is attached to the outer surfaces of the plate members 307 of the shell 305. The shell 305 restrains the tank 301 and compresses elastic sealing members 305 to sealingly engage the cylindrical member 302 and the side wall plate 303 with each other.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
