Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshihiko Ouchi0
Date of Patent
February 20, 2007
Patent Application Number
10936793
Date Filed
September 9, 2004
Patent Primary Examiner
Patent abstract
The present invention provides a semiconductor device including an element that is considered to have less environmental problem (for example iron), and a method for manufacturing the same. More specifically, in a semiconductor device having multiple layers, at least one of the layers includes iron silicide. At least part of the layer including iron silicide is subjected to oxidation processing.
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