Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mitsutoshi Nakamura0
Hirotaka Amakawa0
Date of Patent
February 20, 2007
Patent Application Number
10874306
Date Filed
June 24, 2004
Patent Primary Examiner
Patent abstract
A semiconductor device includes a silicon substrate having a film thickness smaller than a maximum range of a particle generated by a nuclear reaction between a fast neutron and a silicon atom, and a semiconductor element formed on a surface of the silicon substrate.
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