US Patent 7180652 Mars optical modulators
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Patent abstract
The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
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US Patent 07180652 Mars optical modulators US Patent 7180652 Mars optical modulators
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Patent Number
0718065200
Patent Number
718065200
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Patent Jurisdiction
Patent Number
071806520
Date of Patent
February 20, 2007
0Patent Application Number
110608700
Date Filed
February 18, 2005
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
071806520
Date of Patent
February 20, 2007
0Patent Application Number
110608700
Date Filed
February 18, 2005
0Official Website
Patent Primary Examiner
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US Patent 07180652 Mars optical modulators
Infobox
Is a
Patent jurisdiction
Patent number
07180652
Date of patent
February 20, 2007
Patent application number
11060870
Date Filed
February 18, 2005
Patent primary examiner
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