Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuyuki Arai0
Shunpei Yamazaki0
Yasuko Watanabe0
Date of Patent
February 27, 2007
0Patent Application Number
107571670
Date Filed
January 13, 2004
0Patent Primary Examiner
Patent abstract
To provide a method for manufacturing a wiring, a conductive layer, a display device, and a semiconductor device, each of which can meet a large sized substrate and which is manufactured with a higher throughput by using a material efficiently, the conductive layer is formed over the substrate having an insulating surface by discharging the conductive material, and heat treatment is performed by a lamp or a laser beam over the conductive layer. Furthermore, the conductive film is formed under reduced pressure according to the present invention.
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