US Patent 7186171 Composite retaining ring
Patent 7186171 was granted and assigned to Applied Materials on March, 2007 by the United States Patent and Trademark Office.
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Patent abstract
A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.
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US Patent 07186171 Composite retaining ring US Patent 7186171 Composite retaining ring
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Patent Number
0718617100
Patent Number
718617100
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
071861710
Date of Patent
March 6, 2007
0Patent Application Number
114076950
Date Filed
April 19, 2006
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
071861710
Date of Patent
March 6, 2007
0Patent Application Number
114076950
Date Filed
April 19, 2006
0Official Website
Patent Primary Examiner
Edits on 8 Jun, 2022
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US Patent 07186171 Composite retaining ring
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07186171
Date of patent
March 6, 2007
Patent application number
11407695
Date Filed
April 19, 2006
Patent primary examiner
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