Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 6, 2007
Patent Application Number
11293219
Date Filed
December 5, 2005
Patent Primary Examiner
Patent abstract
A film formation apparatus by which a film thickness can be precisely measured and whether the film quality is good or bad can be confirmed in a process of performing film formation according to the aerosol deposition method. The film formation apparatus includes: an aerosol generating unit for generating an aerosol by dispersing a raw material powder by a gas; a holding unit for holding a substrate on which a structure is to be formed; a nozzle for injecting the aerosol generated by the aerosol generating unit toward the substrate; and a measurement unit for measuring an electric potential of a film formation surface on the substrate.
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