US Patent 7186299 Method of rinsing and drying semiconductor substrates
Patent 7186299 was granted and assigned to SAMSUNG ELECTRONICS CO., LTD. on March, 2007 by the United States Patent and Trademark Office.
All edits
Edits on 1 Sep, 2023
Golden AI
Edits made to:
Article (+391 characters)
Article
Patent abstract
A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
Edits on 25 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07186299 Method of rinsing and drying semiconductor substrates US Patent 7186299 Method of rinsing and drying semiconductor substrates
Infobox
Patent Number
0718629900
Patent Number
718629900
Edits on 20 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 2 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
0
Patent Jurisdiction
Patent Number
071862990
Date of Patent
March 6, 2007
0Patent Application Number
107965070
Date Filed
March 9, 2004
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
0
Patent Jurisdiction
Patent Number
071862990
Date of Patent
March 6, 2007
0Patent Application Number
107965070
Date Filed
March 9, 2004
0Official Website
Patent Primary Examiner
Edits on 8 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 20 Nov, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07186299 Method of rinsing and drying semiconductor substrates
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07186299
Date of patent
March 6, 2007
Patent application number
10796507
Date Filed
March 9, 2004
Patent primary examiner
Find more entities like US Patent 7186299 Method of rinsing and drying semiconductor substrates
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
