Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 13, 2007
Patent Application Number
10425782
Date Filed
April 29, 2003
Patent Primary Examiner
Patent abstract
The present invention provides a method and apparatus for wet processing of a conductive layer using a degassed process solution such as a degassed electrochemical deposition solution, a degassed electrochemical polishing solution, a degassed electroless deposition solution, and a degassed cleaning solution. The technique includes degassing the process solution before delivering the degassed process solution to a processing unit or degassing the process solution in-situ, within the processing unit.
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