Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 13, 2007
Patent Application Number
10937270
Date Filed
September 10, 2004
Patent Primary Examiner
Patent abstract
A photosensitive composition containing a compound capable of generating a specific acid having the plural number of sulfonic groups by irradiation with an actinic ray or a radiation and a pattern forming method using the same.
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