US Patent 7189946 Substrate heating device

Patent 7189946 was granted and assigned to NGK Insulators on March, 2007 by the United States Patent and Trademark Office.

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Patent Citations Received

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US Patent 12062554 Progressive heating of components of substrate processing systems using TCR element-based heaters

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Patent Citations Received

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US Patent 11908715 Dynamic temperature control of substrate support in substrate processing system

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Patent Inventor Names

Hideyoshi Tsuruta0

Yoshinobu Goto0

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Patent abstract

A substrate heating device is provided, including a ceramic base plate having a heating surface on which a substrate is placed, resistance heating elements buried in the ceramic base plate corresponding to a plurality of zones into which the heating surface is divided, terminals respectively connected to the resistance heating elements, and lead wires respectively connected to the terminals and wired on an outer surface of the ceramic base plate other than the heating surface.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=071899460

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