US Patent 7190436 Illumination apparatus and exposure apparatus
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Patent Inventor Names
Yutaka Watanabe0
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Patent abstract
An illumination apparatus for illuminating a target surface using light includes a light source that emits the light, a reflection integrator that forms plural secondary light sources using the light from the light source, and an optical unit that differentiates Helmholtz-Lagrange invariants in two orthogonal directions with respect to the light incident upon the reflection integrator.
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US Patent 07190436 Illumination apparatus and exposure apparatus US Patent 7190436 Illumination apparatus and exposure apparatus
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Patent Number
071904360
Patent Number
71904360
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Patent Jurisdiction
Patent Number
071904360
Date of Patent
March 13, 2007
0Patent Application Number
110620240
Date Filed
February 18, 2005
0Official Website
Patent Primary Examiner
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US Patent 07190436 Illumination apparatus and exposure apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07190436
Date of patent
March 13, 2007
Patent application number
11062024
Date Filed
February 18, 2005
Patent primary examiner
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