US Patent 7190460 Focusing optics for small spot optical metrology
Patent 7190460 was granted and assigned to Therma-Wave on March, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 28, 2003
0
Date of Patent
March 13, 2007
0
Patent Application Number
10695007
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Patent Inventor Names
David Y. Wang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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