US Patent 7190523 Wavelength-tunable optical filter
Patent 7190523 was granted and assigned to Seiko Epson on March, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Mitsuhiro Yoda0
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Patent abstract
A wavelength-tunable optical filter includes a stationary mirror, a movable mirror disposed so as to face the stationary mirror, an actuating plate for actuating the movable mirror, and a peripheral supporting portion holding the actuating plate which are disposed above a base layer. The movable mirror is displaced by applying a voltage between the electrodes provided on the actuating plate and the base layer, and the actuating plate is disposed between the movable mirror and the peripheral supporting portion so as to be displaced due to an electrostatic force.
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US Patent 07190523 Wavelength-tunable optical filter US Patent 7190523 Wavelength-tunable optical filter
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Patent Number
071905230
Patent Number
71905230
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Current Assignee
Patent Jurisdiction
Patent Number
071905230
Date of Patent
March 13, 2007
0Patent Application Number
108612290
Date Filed
June 3, 2004
0Official Website
Patent Primary Examiner
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US Patent 07190523 Wavelength-tunable optical filter
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07190523
Date of patent
March 13, 2007
Patent application number
10861229
Date Filed
June 3, 2004
Patent primary examiner
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