Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Johann Karner0
David Franz0
Date of Patent
March 20, 2007
0Patent Application Number
104918580
Date Filed
October 7, 2002
0Patent Primary Examiner
Patent abstract
The present invention relates to a method for diamond coating of substrates in which the substrate is exposed in a vacuum atmosphere to a reactive gas mixture excited by means of a plasma discharge, the plasma discharge comprising a plasma beam (14) in an evacuated receiver (16) that is formed between a cathode chamber (1) and an anode (2), and the reactive gas mixture comprising a reactive gas and a working gas, the reactive gas in (9) and the working gas in (8) and/or (9) introduced into the receiver, and the receiver (16) is evacuated by a pump arrangement (15), and the hydrogen concentration of the reactive gas mixture being 0–45 vol. %.
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