US Patent 7192849 Methods of growing nitride-based film using varying pulses
Patent 7192849 was granted and assigned to Sensor Electronic Technology on March, 2007 by the United States Patent and Trademark Office.
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Patent abstract
Nitride-based film is grown using multiple precursor fluxes. Each precursor flux is pulsed one or more times to add a desired element to the nitride-based film at a desired time. The quantity, duration, timing, and/or shape of the pulses is customized for each element to assist in generating a high quality nitride-based film.
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US Patent 07192849 Methods of growing nitride-based film using varying pulses US Patent 7192849 Methods of growing nitride-based film using varying pulses
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Patent Number
0719284900
Patent Number
719284900
Edits on 26 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
071928490
Date of Patent
March 20, 2007
0Patent Application Number
107133260
Date Filed
November 14, 2003
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
071928490
Date of Patent
March 20, 2007
0Patent Application Number
107133260
Date Filed
November 14, 2003
0Official Website
Patent Primary Examiner
Edits on 8 Jun, 2022
Golden AI
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US Patent 07192849 Methods of growing nitride-based film using varying pulses
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07192849
Date of patent
March 20, 2007
Patent application number
10713326
Date Filed
November 14, 2003
Patent primary examiner
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