Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshitaka Nakamura0
Norinao Kouma0
Osamu Tsuboi0
Satoshi Ueda0
Hiromitsu Soneda0
Hisao Okuda0
Ippei Sawaki0
Mi Xiaoyu0
Date of Patent
March 20, 2007
0Patent Application Number
112078710
Date Filed
August 22, 2005
0Patent Primary Examiner
Patent abstract
A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.
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