Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 20, 2007
Patent Application Number
10555141
Date Filed
April 22, 2004
Patent Primary Examiner
Patent abstract
A method for texturing surfaces of silicon wafers comprising the steps of dipping the silicon wafers in an etching solution of water, concentrated hydrofluoric acid and concentrated nitric acid and setting a temperature for the etching solution. The etching solution comprises, in percent, 20% to 55% water, 10% to 40% concentrated hydrofluoric acid and 20% to 60% concentrated nitric acid and the temperature of the etching solution is between 0 and 15 degrees Celsius.
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