Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 27, 2007
Patent Application Number
09815983
Date Filed
March 23, 2001
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.