US Patent 7195021 In-situ cleaning of light source collector optics
Patent 7195021 was granted and assigned to Intel on March, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Mark Doczy0
Michael Chan0
Robert Bristol0
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Patent abstract
A method for cleaning optics in a chamber. The method can include introducing a first etchant into a chamber that encloses an optical component and a source of electromagnetic radiation that is suitable for lithography, ionizing the first etchant, and removing debris from a surface of the optical component.
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US Patent 07195021 In-situ cleaning of light source collector optics US Patent 7195021 In-situ cleaning of light source collector optics
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Patent Number
071950210
Patent Number
71950210
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Current Assignee
Patent Jurisdiction
Patent Number
071950210
Date of Patent
March 27, 2007
0Patent Application Number
112170080
Date Filed
August 30, 2005
0Official Website
Patent Primary Examiner
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US Patent 07195021 In-situ cleaning of light source collector optics
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07195021
Date of patent
March 27, 2007
Patent application number
11217008
Date Filed
August 30, 2005
Patent primary examiner
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