Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michihiko Takase0
Hiroyuki Furukawa0
Jun Shinozaki0
Date of Patent
March 27, 2007
0Patent Application Number
105139560
Date Filed
February 16, 2004
0Patent Primary Examiner
Patent abstract
The invention relates to a process for manufacturing plasma display panel and a substrate holder, preventing an occurrence of dust giving an unfavorable effect in a forming process of a film on a substrate of a plasma display panel in a film forming apparatus. When forming the film, a substrate (3) and a dummy substrate (35) are held by a first substrate holder (31) composed of a supporter sustaining underneath the substrate and a restrictor restricting a position of the substrates (3) in a plane direction, and a second substrate holder (32) sustaining the first substrate holder (31).
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