Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
John H. Brennan0
Michael W. Price0
Liming Wang0
Juergen Tinz0
Date of Patent
April 3, 2007
0Patent Application Number
110599800
Date Filed
February 16, 2005
0Patent Primary Examiner
Patent abstract
A method of making below 250-nm UV light transmitting optical fluoride lithography crystals includes applying heat along a shortest path of conduction of a selected optical fluoride crystal, heating the optical fluoride crystal to an annealing temperature, holding the temperature of the optical fluoride crystal at the annealing temperature, and gradually cooling the optical fluoride crystal to provide a low-birefringence optical fluoride crystal for transmitting below 250-nm UV light.
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