US Patent 7199328 Apparatus and method for plasma processing
Patent 7199328 was granted and assigned to Tokyo Electron on April, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 29, 2002
0
Date of Patent
April 3, 2007
0
Patent Application Number
10487232
0
Patent Inventor Names
Eric J. Strang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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