Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 3, 2007
Patent Application Number
11128219
Date Filed
May 13, 2005
Patent Primary Examiner
Patent abstract
A scan exposure apparatus according to this invention determines a scan velocity and a focus measurement position from process conditions and the like and determines a threshold Δ of the focus measurement position on the basis of the scan velocity. The scan exposure apparatus executes focus measurement if a stage position falls within the range of the threshold Δ.
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