Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rahul Agarwal0
Shinzo Onishi0
Shekhar Bhansali0
Scott Samson0
Date of Patent
April 10, 2007
0Patent Application Number
107109830
Date Filed
August 16, 2004
0Patent Primary Examiner
Patent abstract
The present invention includes a novel method to fabricate corner cube retroreflectors, CCRs, where a majority of the wafer area acts as CCRs as compared to a maximum of 33% in previous MEMS CCRs. The present invention also allows for the fabrication of moveable cantilevers which operate at one-third the voltage as compared to a conventional planar cantilever.
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