Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wataru Sato0
Ryoji Hoshi0
Susumu Sonokawa0
Tomohiko Ohta0
Date of Patent
April 10, 2007
0Patent Application Number
105037210
Date Filed
September 8, 2003
0Patent Primary Examiner
Patent abstract
The present invention provides a heater for manufacturing a crystal by the Czochralski method comprising at least terminal portions supplied with current and a heat generating portion by resistance heating, and being arranged so as to surround a crucible containing a raw material melt, wherein the heater has a uniform heat generation distribution to the raw material melt after deformation while in use during crystal manufacture. It is thus possible to prevent hindrance of monocrystallization and unstable crystal quality caused by ununiform temperature in the raw material melt due to deformation of the shape of the heater's heat generating portion while in use during crystal manufacture.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
