Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ping Mei0
Carl P. Taussig0
Han-Jun Kim0
Date of Patent
April 10, 2007
0Patent Application Number
110257500
Date Filed
December 22, 2004
0Patent Primary Examiner
Patent abstract
This invention provides a method of forming at least one thin film device, such as for example a thin film transistor. The method includes providing a substrate and depositing a plurality of thin film device layers upon the substrate. An imprinted 3D template structure is provided upon the plurality of thin film device layers. The plurality of thin film layers and 3D template structure are etched and at least one thin film layer is undercut.
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