US Patent 7203008 Very high-aperture projection objective
Patent 7203008 was granted and assigned to Carl Zeiss SMT on April, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 8, 2004
0
Date of Patent
April 10, 2007
0
Patent Application Number
10935321
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Patent Inventor Names
Karl-Heinz Schuster
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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