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US Patent 7204921 Vacuum apparatus and vacuum processing method

Patent 7204921 was granted and assigned to Ulvac on April, 2007 by the United States Patent and Trademark Office.

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Patent abstract

A vacuum apparatus which can easily regenerate plasma is provided. A matching box used in the vacuum apparatus can vary the impedance thereof by varying the magnitudes of the inductance of variable inductance elements. Controlling the magnitude of direct current makes it possible to control the magnitudes of inductance of the variable inductance elements so that it is possible to carry out matching operation at high speed.

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