Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Patrick D. Boyd0
Date of Patent
April 17, 2007
Patent Application Number
10334841
Date Filed
December 31, 2002
Patent Primary Examiner
Patent abstract
The present invention describes a method of providing a substrate, the substrate being transparent to radiation at an actinic wavelength; forming an absorber layer over the substrate, the absorber layer including an active area and a peripheral area; removing the absorber layer from a portion of the peripheral area; and forming a trench in the substrate in the portion of the peripheral area.
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