Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chien-Ping Chang0
Tien-Min Yuan0
Mao-Song Tseng0
Hsin-Huang Hsieh0
Date of Patent
April 17, 2007
0Patent Application Number
110357000
Date Filed
January 14, 2005
0Patent Primary Examiner
Patent abstract
The present invention provides a manufacturing process and the structure of an integrated circuit. In one embodiment, one polysilicon layer deposition and one polysilicon layer etching are used to form the gate of a trench device and the polysilicon layer of a planar device simultaneously. The present invention not only has overcome the problem of the electric leakage, but also has the advantages of withstanding a higher voltage, reducing the relevant cost and increasing the yields. The present invention possesses the outstanding technical features in the field of the power device.
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