Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
April 17, 2007
Patent Application Number
10357812
Date Filed
February 4, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods of forming an oxide layer such as high aspect ratio trench isolations, and treating the oxide substrate to remove carbon, structures formed by the method, and devices and systems incorporating the oxide material are provided.
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